At what point does this error show up exactly? Even with that info there probably isn't much we can do to fix it. All I know is it's having some problem returning the method: Boolean StartWithCreateProcess(System.Diagnostics.ProcessStartInfo).
It states it's a system error. Judging from the method wording and it's return type, it sounds like it's having trouble loading a new process into your process queue, though I don't know why it would specifically effect Aion and nothing else(assuming this is the case). You should try restarting to clear your process queue. Otherwise, I don't know what else to tell you except to contact support.